● Micro-nano focal spot size to ensure the high resolution of the system
● Small distance between the test sample and the focus to achieve high-resolution imaging with transmissive X-ray source
● Multiple scanning modes: spiral, offset, limited angle and others
● Auto sampling system for batch automated testing
Resolution
Detectability | 200nm(Flat panel detector) / 40nm(Objective coupling detector) |
Spatial resolution* | 500nm(Flat panel detector) / 500nm(Objective coupling detector) |
X-ray source
Tube type | Open, Transmission(micro/nano focus) |
Voltage | 240KV / 225KV / 190KV / 160KV |
Detector1 (Flat panel)
Imaging area | 244mm×195mm |
Pixel matrix | 1920×1536 |
Detector2 (Objective coupling detector), optional
Objecives | 4X、10X、20X |
Sample
Maximum size | 450mm×350mm(diameter × height) |
Maximum weight | 15kg |
Equipment
Dimension | 2460mm×1250mm×1950mm(length × width × height) |
Weight | 5000kg |
*Spatial resolution measured with resolution chart
▲ Configurable hardware and software according to demands.
In situ 4D imaging Combined with in-situ mechanics and temperature loading devices, 4D CT imaging is realized. |
Objective lens coupling detector The objective lens coupling detector is to realize high resolution imaging at a long working distance. |