● Grating ruler closed cycle control system
● Granitic base to guarantee the temperature stability
● Less running axles to ensure a long-term high precision
Resolution
Detectability | 500nm |
Spatial resolution* | 2μm |
Metrology accuracy | 9μm+L/100 |
X-ray source
Tube type | Open, Reflection |
Voltage | 300KV / 240KV / 225KV / 190KV / 160KV |
Detector (Flat panel)
Imaging area | 427mm×427mm |
Pixel matrix | 3072×3072 |
Sample
Maximum size | 600mm×550mm(diameter × height) |
Maximum weight | 25kg |
Equipment
Dimension | 2770mm×1440mm×2040mm(length × width × height) |
Weight | 7500kg |
*Spatial resolution measured with resolution chart
▲ Configurable hardware and software according to demands.